Wafer cleaning to clean working environment and cleaning equipment have very high requirements. The wafer cleaning machine adopts dc servo motor as drive motor controller, but the carbon brush wear brings pollution to dust-free working environment, increases the maintenance costs. Rare earth permanent magnet brushless dc motor is cancelled carbon brush and commutator, high reliability, free maintenance, high efficiency, is the ideal alternative motor brush dc motor controller. First, the related theory of concentrated winding brushless motor controller problems are studied, such as analysis table width of rotor magnet steel stick type brushless motor controller and air gap flux density waveform, the relationship between brushless motor controller without position sensor position detection methodInductive method, on the basis of the developed wafer cleaning machine hollow shaft brushless motor controller; Secondly, in the research institute developed general controller based on the brushless motor controller used for wafer cleaning machine is designed and produced brushless motor controller controller; Again, the wafer cleaning machine to study the control strategy of brushless motor controller, software development and on-site debugging and testing and then; Finally the other wave brushless motor controller within the scope of the torque ripple suppression at full speed, low speed, medium speed and high speed is proposed control strategy, and then the software design and debugging and test. Above is today we are going to introduce you to all the content, if you have any questions, you can call contact us, also can personally to the company, will provide the high quality service for you.
